3/28/2011	10:34:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/28/2011	10:34:16 AM	Recipe started at 10:34 AM
3/28/2011	10:34:16 AM	H2 valve closed
3/28/2011	10:34:16 AM	BCl3 valve closed
3/28/2011	10:34:16 AM	PH3 valve closed
3/28/2011	10:34:16 AM	SiCl4 pre valve closed
3/28/2011	10:34:16 AM	SiCl4 post valve closed
3/28/2011	10:34:16 AM	Main Vac valve closed
3/28/2011	10:34:16 AM	Bypass valve closed
3/28/2011	10:34:16 AM	Bubbler valve closed
3/28/2011	10:34:16 AM	Helium valve opened
3/28/2011	10:34:16 AM	Helium MFC set to  500.000000
3/28/2011	10:34:16 AM	H2 MFC set to  0.000000
3/28/2011	10:34:16 AM	BCl3 MFC set to  0.000000
3/28/2011	10:34:16 AM	PHl3 MFC set to  0.000000
3/28/2011	10:34:16 AM	SiCl4 MFC set to  0.000000
3/28/2011	10:34:16 AM	Bypass solenoid MFC set to  0.000000
3/28/2011	10:34:16 AM	Tube furnace set to 0
3/28/2011	10:35:37 AM	Helium valve closed
3/28/2011	10:35:37 AM	H2 valve closed
3/28/2011	10:35:37 AM	BCl3 valve closed
3/28/2011	10:35:37 AM	PH3 valve closed
3/28/2011	10:35:37 AM	SiCl4 pre valve closed
3/28/2011	10:35:37 AM	SiCl4 post valve closed
3/28/2011	10:35:37 AM	Main Vac valve closed
3/28/2011	10:35:37 AM	Bypass valve closed
3/28/2011	10:35:37 AM	Bubbler valve closed
3/28/2011	10:35:37 AM	Helium MFC set to  0.000000
3/28/2011	10:35:37 AM	H2 MFC set to  0.000000
3/28/2011	10:35:37 AM	BCl3 MFC set to  0.000000
3/28/2011	10:35:37 AM	PHl3 MFC set to  0.000000
3/28/2011	10:35:37 AM	SiCl4 MFC set to  0.000000
3/28/2011	10:35:37 AM	Bypass solenoid MFC set to  0.000000
3/28/2011	10:35:37 AM	Tube furnace set to 0
3/28/2011	10:35:38 AM	Run finished at 10:35 AM
3/28/2011	10:35:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/28/2011	10:45:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/28/2011	10:45:26 AM	Recipe started at 10:45 AM
3/28/2011	10:45:26 AM	Helium valve closed
3/28/2011	10:45:26 AM	H2 valve closed
3/28/2011	10:45:26 AM	BCl3 valve closed
3/28/2011	10:45:26 AM	PH3 valve closed
3/28/2011	10:45:26 AM	SiCl4 pre valve closed
3/28/2011	10:45:26 AM	SiCl4 post valve closed
3/28/2011	10:45:26 AM	Main Vac valve closed
3/28/2011	10:45:26 AM	Bubbler valve closed
3/28/2011	10:45:26 AM	Bypass valve opened
3/28/2011	10:45:26 AM	Helium MFC set to  0.000000
3/28/2011	10:45:26 AM	H2 MFC set to  0.000000
3/28/2011	10:45:26 AM	BCl3 MFC set to  0.000000
3/28/2011	10:45:26 AM	PHl3 MFC set to  0.000000
3/28/2011	10:45:26 AM	SiCl4 MFC set to  0.000000
3/28/2011	10:45:26 AM	Bypass solenoid MFC set to  0.000000
3/28/2011	10:45:26 AM	Tube furnace set to 0
3/28/2011	10:45:59 AM	Helium valve closed
3/28/2011	10:45:59 AM	H2 valve closed
3/28/2011	10:45:59 AM	BCl3 valve closed
3/28/2011	10:45:59 AM	PH3 valve closed
3/28/2011	10:45:59 AM	SiCl4 pre valve closed
3/28/2011	10:45:59 AM	SiCl4 post valve closed
3/28/2011	10:45:59 AM	Bubbler valve closed
3/28/2011	10:45:59 AM	Main Vac valve opened
3/28/2011	10:45:59 AM	Bypass valve opened
3/28/2011	10:45:59 AM	Helium MFC set to  0.000000
3/28/2011	10:45:59 AM	H2 MFC set to  0.000000
3/28/2011	10:45:59 AM	BCl3 MFC set to  0.000000
3/28/2011	10:45:59 AM	PHl3 MFC set to  0.000000
3/28/2011	10:45:59 AM	SiCl4 MFC set to  0.000000
3/28/2011	10:45:59 AM	Bypass solenoid MFC set to  0.000000
3/28/2011	10:45:59 AM	Tube furnace set to 0
3/28/2011	10:45:59 AM	Run finished at 10:45 AM
3/28/2011	10:45:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/28/2011	10:46:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/28/2011	10:46:43 AM	Recipe started at 10:46 AM
3/28/2011	10:46:43 AM	H2 valve closed
3/28/2011	10:46:43 AM	BCl3 valve closed
3/28/2011	10:46:43 AM	PH3 valve closed
3/28/2011	10:46:43 AM	SiCl4 pre valve closed
3/28/2011	10:46:43 AM	SiCl4 post valve closed
3/28/2011	10:46:43 AM	Main Vac valve closed
3/28/2011	10:46:43 AM	Bypass valve closed
3/28/2011	10:46:43 AM	Bubbler valve closed
3/28/2011	10:46:43 AM	Helium valve opened
3/28/2011	10:46:43 AM	Helium MFC set to  500.000000
3/28/2011	10:46:43 AM	H2 MFC set to  0.000000
3/28/2011	10:46:43 AM	BCl3 MFC set to  0.000000
3/28/2011	10:46:43 AM	PHl3 MFC set to  0.000000
3/28/2011	10:46:43 AM	SiCl4 MFC set to  0.000000
3/28/2011	10:46:43 AM	Bypass solenoid MFC set to  0.000000
3/28/2011	10:46:43 AM	Tube furnace set to 0
3/28/2011	10:48:03 AM	Helium valve closed
3/28/2011	10:48:03 AM	H2 valve closed
3/28/2011	10:48:03 AM	BCl3 valve closed
3/28/2011	10:48:03 AM	PH3 valve closed
3/28/2011	10:48:03 AM	SiCl4 pre valve closed
3/28/2011	10:48:03 AM	SiCl4 post valve closed
3/28/2011	10:48:03 AM	Main Vac valve closed
3/28/2011	10:48:03 AM	Bypass valve closed
3/28/2011	10:48:03 AM	Bubbler valve closed
3/28/2011	10:48:03 AM	Helium MFC set to  0.000000
3/28/2011	10:48:03 AM	H2 MFC set to  0.000000
3/28/2011	10:48:03 AM	BCl3 MFC set to  0.000000
3/28/2011	10:48:03 AM	PHl3 MFC set to  0.000000
3/28/2011	10:48:03 AM	SiCl4 MFC set to  0.000000
3/28/2011	10:48:03 AM	Bypass solenoid MFC set to  0.000000
3/28/2011	10:48:03 AM	Tube furnace set to 0
3/28/2011	10:48:03 AM	Run finished at 10:48 AM
3/28/2011	10:48:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/28/2011	10:51:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/28/2011	10:51:10 AM	Recipe started at 10:51 AM
3/28/2011	10:51:10 AM	Helium valve closed
3/28/2011	10:51:10 AM	H2 valve closed
3/28/2011	10:51:10 AM	BCl3 valve closed
3/28/2011	10:51:10 AM	PH3 valve closed
3/28/2011	10:51:10 AM	SiCl4 pre valve closed
3/28/2011	10:51:10 AM	SiCl4 post valve closed
3/28/2011	10:51:10 AM	Main Vac valve closed
3/28/2011	10:51:10 AM	Bubbler valve closed
3/28/2011	10:51:10 AM	Bypass valve opened
3/28/2011	10:51:10 AM	Helium MFC set to  0.000000
3/28/2011	10:51:10 AM	H2 MFC set to  0.000000
3/28/2011	10:51:10 AM	BCl3 MFC set to  0.000000
3/28/2011	10:51:10 AM	PHl3 MFC set to  0.000000
3/28/2011	10:51:10 AM	SiCl4 MFC set to  0.000000
3/28/2011	10:51:10 AM	Bypass solenoid MFC set to  0.000000
3/28/2011	10:51:10 AM	Tube furnace set to 0
3/28/2011	10:51:59 AM	Helium valve closed
3/28/2011	10:51:59 AM	H2 valve closed
3/28/2011	10:51:59 AM	BCl3 valve closed
3/28/2011	10:51:59 AM	PH3 valve closed
3/28/2011	10:51:59 AM	SiCl4 pre valve closed
3/28/2011	10:51:59 AM	SiCl4 post valve closed
3/28/2011	10:51:59 AM	Bubbler valve closed
3/28/2011	10:51:59 AM	Main Vac valve opened
3/28/2011	10:51:59 AM	Bypass valve opened
3/28/2011	10:51:59 AM	Helium MFC set to  0.000000
3/28/2011	10:51:59 AM	H2 MFC set to  0.000000
3/28/2011	10:51:59 AM	BCl3 MFC set to  0.000000
3/28/2011	10:51:59 AM	PHl3 MFC set to  0.000000
3/28/2011	10:51:59 AM	SiCl4 MFC set to  0.000000
3/28/2011	10:51:59 AM	Bypass solenoid MFC set to  0.000000
3/28/2011	10:51:59 AM	Tube furnace set to 0
3/28/2011	10:51:59 AM	Run finished at 10:51 AM
3/28/2011	10:51:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/28/2011	10:52:53 AM	Helium MFC set to  20.000000
3/28/2011	10:52:54 AM	Helium valve opened
3/28/2011	11:47:50 AM	Helium valve closed
3/28/2011	11:50:06 AM	Helium MFC set to  10.000000
3/28/2011	11:50:06 AM	Helium valve opened
3/28/2011	12:46:40 PM	Helium valve closed
3/28/2011	12:50:18 PM	Helium MFC set to  20.000000
3/28/2011	12:50:19 PM	Helium valve opened
3/28/2011	12:55:09 PM	Helium valve closed
3/28/2011	12:57:01 PM	Helium valve opened
3/28/2011	12:58:00 PM	Helium valve closed
3/28/2011	12:59:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/28/2011	12:59:32 PM	Recipe started at 12:59 PM
3/28/2011	12:59:32 PM	Helium valve closed
3/28/2011	12:59:32 PM	H2 valve closed
3/28/2011	12:59:32 PM	BCl3 valve closed
3/28/2011	12:59:32 PM	PH3 valve closed
3/28/2011	12:59:32 PM	SiCl4 pre valve closed
3/28/2011	12:59:32 PM	SiCl4 post valve closed
3/28/2011	12:59:32 PM	Main Vac valve closed
3/28/2011	12:59:32 PM	Bypass valve closed
3/28/2011	12:59:32 PM	Bubbler valve closed
3/28/2011	12:59:32 PM	Helium MFC set to  0.000000
3/28/2011	12:59:32 PM	H2 MFC set to  0.000000
3/28/2011	12:59:32 PM	BCl3 MFC set to  0.000000
3/28/2011	12:59:32 PM	PHl3 MFC set to  0.000000
3/28/2011	12:59:32 PM	SiCl4 MFC set to  0.000000
3/28/2011	12:59:32 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	12:59:32 PM	Tube furnace set to 0
3/28/2011	12:59:32 PM	Run finished at 12:59 PM
3/28/2011	12:59:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/28/2011	12:59:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/28/2011	12:59:48 PM	Recipe started at 12:59 PM
3/28/2011	12:59:48 PM	Helium valve closed
3/28/2011	12:59:48 PM	H2 valve closed
3/28/2011	12:59:48 PM	BCl3 valve closed
3/28/2011	12:59:48 PM	PH3 valve closed
3/28/2011	12:59:48 PM	SiCl4 pre valve closed
3/28/2011	12:59:48 PM	SiCl4 post valve closed
3/28/2011	12:59:48 PM	Main Vac valve closed
3/28/2011	12:59:48 PM	Bubbler valve closed
3/28/2011	12:59:48 PM	Bypass valve opened
3/28/2011	12:59:48 PM	Helium MFC set to  0.000000
3/28/2011	12:59:48 PM	H2 MFC set to  0.000000
3/28/2011	12:59:48 PM	BCl3 MFC set to  0.000000
3/28/2011	12:59:48 PM	PHl3 MFC set to  0.000000
3/28/2011	12:59:48 PM	SiCl4 MFC set to  0.000000
3/28/2011	12:59:48 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	12:59:48 PM	Tube furnace set to 0
3/28/2011	12:59:48 PM	Helium valve closed
3/28/2011	12:59:48 PM	H2 valve closed
3/28/2011	12:59:48 PM	BCl3 valve closed
3/28/2011	12:59:48 PM	PH3 valve closed
3/28/2011	12:59:48 PM	SiCl4 pre valve closed
3/28/2011	12:59:48 PM	SiCl4 post valve closed
3/28/2011	12:59:48 PM	Bubbler valve closed
3/28/2011	12:59:48 PM	Main Vac valve opened
3/28/2011	12:59:48 PM	Bypass valve opened
3/28/2011	12:59:48 PM	Helium MFC set to  0.000000
3/28/2011	12:59:48 PM	H2 MFC set to  0.000000
3/28/2011	12:59:48 PM	BCl3 MFC set to  0.000000
3/28/2011	12:59:48 PM	PHl3 MFC set to  0.000000
3/28/2011	12:59:48 PM	SiCl4 MFC set to  0.000000
3/28/2011	12:59:48 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	12:59:48 PM	Tube furnace set to 0
3/28/2011	12:59:48 PM	Run finished at 12:59 PM
3/28/2011	12:59:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/28/2011	1:00:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/28/2011	1:00:34 PM	Recipe started at 1:00 PM
3/28/2011	1:00:34 PM	Helium valve closed
3/28/2011	1:00:34 PM	H2 valve closed
3/28/2011	1:00:34 PM	BCl3 valve closed
3/28/2011	1:00:34 PM	PH3 valve closed
3/28/2011	1:00:34 PM	SiCl4 pre valve closed
3/28/2011	1:00:34 PM	SiCl4 post valve closed
3/28/2011	1:00:34 PM	Main Vac valve closed
3/28/2011	1:00:34 PM	Bypass valve closed
3/28/2011	1:00:34 PM	Bubbler valve closed
3/28/2011	1:00:34 PM	Helium MFC set to  0.000000
3/28/2011	1:00:34 PM	H2 MFC set to  0.000000
3/28/2011	1:00:34 PM	BCl3 MFC set to  0.000000
3/28/2011	1:00:34 PM	PHl3 MFC set to  0.000000
3/28/2011	1:00:34 PM	SiCl4 MFC set to  0.000000
3/28/2011	1:00:34 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	1:00:34 PM	Tube furnace set to 0
3/28/2011	1:00:34 PM	Run finished at 1:00 PM
3/28/2011	1:00:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/28/2011	1:00:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/28/2011	1:00:58 PM	Recipe started at 1:00 PM
3/28/2011	1:00:58 PM	Helium valve closed
3/28/2011	1:00:58 PM	H2 valve closed
3/28/2011	1:00:58 PM	BCl3 valve closed
3/28/2011	1:00:58 PM	PH3 valve closed
3/28/2011	1:00:58 PM	SiCl4 pre valve closed
3/28/2011	1:00:58 PM	SiCl4 post valve closed
3/28/2011	1:00:58 PM	Main Vac valve closed
3/28/2011	1:00:58 PM	Bubbler valve closed
3/28/2011	1:00:58 PM	Bypass valve opened
3/28/2011	1:00:58 PM	Helium MFC set to  0.000000
3/28/2011	1:00:58 PM	H2 MFC set to  0.000000
3/28/2011	1:00:58 PM	BCl3 MFC set to  0.000000
3/28/2011	1:00:58 PM	PHl3 MFC set to  0.000000
3/28/2011	1:00:58 PM	SiCl4 MFC set to  0.000000
3/28/2011	1:00:58 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	1:00:59 PM	Tube furnace set to 0
3/28/2011	1:00:59 PM	Helium valve closed
3/28/2011	1:00:59 PM	H2 valve closed
3/28/2011	1:00:59 PM	BCl3 valve closed
3/28/2011	1:00:59 PM	PH3 valve closed
3/28/2011	1:00:59 PM	SiCl4 pre valve closed
3/28/2011	1:00:59 PM	SiCl4 post valve closed
3/28/2011	1:00:59 PM	Bubbler valve closed
3/28/2011	1:00:59 PM	Main Vac valve opened
3/28/2011	1:00:59 PM	Bypass valve opened
3/28/2011	1:00:59 PM	Helium MFC set to  0.000000
3/28/2011	1:00:59 PM	H2 MFC set to  0.000000
3/28/2011	1:00:59 PM	BCl3 MFC set to  0.000000
3/28/2011	1:00:59 PM	PHl3 MFC set to  0.000000
3/28/2011	1:00:59 PM	SiCl4 MFC set to  0.000000
3/28/2011	1:00:59 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	1:00:59 PM	Tube furnace set to 0
3/28/2011	1:00:59 PM	Run finished at 1:00 PM
3/28/2011	1:00:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/28/2011	1:01:26 PM	Helium MFC set to  40.000000
3/28/2011	1:01:26 PM	Helium valve opened
3/28/2011	1:08:02 PM	Helium valve closed
3/28/2011	1:09:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/28/2011	1:09:04 PM	Recipe started at 1:09 PM
3/28/2011	1:09:04 PM	H2 valve closed
3/28/2011	1:09:04 PM	BCl3 valve closed
3/28/2011	1:09:04 PM	PH3 valve closed
3/28/2011	1:09:04 PM	SiCl4 pre valve closed
3/28/2011	1:09:04 PM	SiCl4 post valve closed
3/28/2011	1:09:04 PM	Main Vac valve closed
3/28/2011	1:09:04 PM	Bypass valve closed
3/28/2011	1:09:04 PM	Bubbler valve closed
3/28/2011	1:09:04 PM	Helium valve opened
3/28/2011	1:09:04 PM	Helium MFC set to  500.000000
3/28/2011	1:09:04 PM	H2 MFC set to  0.000000
3/28/2011	1:09:04 PM	BCl3 MFC set to  0.000000
3/28/2011	1:09:04 PM	PHl3 MFC set to  0.000000
3/28/2011	1:09:04 PM	SiCl4 MFC set to  0.000000
3/28/2011	1:09:04 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	1:09:04 PM	Tube furnace set to 0
3/28/2011	1:10:24 PM	Helium valve closed
3/28/2011	1:10:25 PM	H2 valve closed
3/28/2011	1:10:25 PM	BCl3 valve closed
3/28/2011	1:10:25 PM	PH3 valve closed
3/28/2011	1:10:25 PM	SiCl4 pre valve closed
3/28/2011	1:10:25 PM	SiCl4 post valve closed
3/28/2011	1:10:25 PM	Main Vac valve closed
3/28/2011	1:10:25 PM	Bypass valve closed
3/28/2011	1:10:25 PM	Bubbler valve closed
3/28/2011	1:10:25 PM	Helium MFC set to  0.000000
3/28/2011	1:10:25 PM	H2 MFC set to  0.000000
3/28/2011	1:10:25 PM	BCl3 MFC set to  0.000000
3/28/2011	1:10:25 PM	PHl3 MFC set to  0.000000
3/28/2011	1:10:25 PM	SiCl4 MFC set to  0.000000
3/28/2011	1:10:25 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	1:10:25 PM	Tube furnace set to 0
3/28/2011	1:10:25 PM	Run finished at 1:10 PM
3/28/2011	1:10:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/28/2011	1:17:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/28/2011	1:17:02 PM	Recipe started at 1:17 PM
3/28/2011	1:17:02 PM	Helium valve closed
3/28/2011	1:17:02 PM	H2 valve closed
3/28/2011	1:17:02 PM	BCl3 valve closed
3/28/2011	1:17:02 PM	PH3 valve closed
3/28/2011	1:17:02 PM	SiCl4 pre valve closed
3/28/2011	1:17:02 PM	SiCl4 post valve closed
3/28/2011	1:17:02 PM	Main Vac valve closed
3/28/2011	1:17:02 PM	Bubbler valve closed
3/28/2011	1:17:02 PM	Bypass valve opened
3/28/2011	1:17:02 PM	Helium MFC set to  0.000000
3/28/2011	1:17:02 PM	H2 MFC set to  0.000000
3/28/2011	1:17:02 PM	BCl3 MFC set to  0.000000
3/28/2011	1:17:02 PM	PHl3 MFC set to  0.000000
3/28/2011	1:17:02 PM	SiCl4 MFC set to  0.000000
3/28/2011	1:17:02 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	1:17:03 PM	Tube furnace set to 0
3/28/2011	1:17:34 PM	Helium valve closed
3/28/2011	1:17:34 PM	H2 valve closed
3/28/2011	1:17:34 PM	BCl3 valve closed
3/28/2011	1:17:34 PM	PH3 valve closed
3/28/2011	1:17:34 PM	SiCl4 pre valve closed
3/28/2011	1:17:34 PM	SiCl4 post valve closed
3/28/2011	1:17:34 PM	Bubbler valve closed
3/28/2011	1:17:34 PM	Main Vac valve opened
3/28/2011	1:17:34 PM	Bypass valve opened
3/28/2011	1:17:34 PM	Helium MFC set to  0.000000
3/28/2011	1:17:34 PM	H2 MFC set to  0.000000
3/28/2011	1:17:34 PM	BCl3 MFC set to  0.000000
3/28/2011	1:17:34 PM	PHl3 MFC set to  0.000000
3/28/2011	1:17:34 PM	SiCl4 MFC set to  0.000000
3/28/2011	1:17:34 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	1:17:34 PM	Tube furnace set to 0
3/28/2011	1:17:35 PM	Run finished at 1:17 PM
3/28/2011	1:17:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/28/2011	1:17:48 PM	Helium MFC set to  40.000000
3/28/2011	1:17:51 PM	Helium valve opened
3/28/2011	1:18:33 PM	Helium valve closed
3/28/2011	1:18:51 PM	Helium valve opened
3/28/2011	1:18:57 PM	Helium valve closed
3/28/2011	1:19:19 PM	Helium valve opened
3/28/2011	1:19:27 PM	Helium valve closed
3/28/2011	1:20:30 PM	Helium MFC set to  20.000000
3/28/2011	1:20:30 PM	Helium valve opened
3/28/2011	1:26:52 PM	Helium valve closed
3/28/2011	1:27:25 PM	Helium valve opened
3/28/2011	2:48:59 PM	Helium valve closed
3/28/2011	2:49:53 PM	Recipe started at 2:49 PM
3/28/2011	2:49:53 PM	Helium valve closed
3/28/2011	2:49:53 PM	BCl3 valve closed
3/28/2011	2:49:53 PM	PH3 valve closed
3/28/2011	2:49:53 PM	SiCl4 pre valve closed
3/28/2011	2:49:53 PM	SiCl4 post valve closed
3/28/2011	2:49:53 PM	Main Vac valve closed
3/28/2011	2:49:53 PM	Bypass valve closed
3/28/2011	2:49:53 PM	Bubbler valve closed
3/28/2011	2:49:53 PM	H2 valve opened
3/28/2011	2:49:53 PM	Helium MFC set to  0.000000
3/28/2011	2:49:53 PM	H2 MFC set to  500.000000
3/28/2011	2:49:53 PM	BCl3 MFC set to  0.000000
3/28/2011	2:49:53 PM	PHl3 MFC set to  0.000000
3/28/2011	2:49:53 PM	SiCl4 MFC set to  0.000000
3/28/2011	2:49:53 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	2:49:53 PM	Tube furnace set to 0
3/28/2011	2:51:15 PM	Helium valve closed
3/28/2011	2:51:15 PM	BCl3 valve closed
3/28/2011	2:51:15 PM	PH3 valve closed
3/28/2011	2:51:15 PM	SiCl4 pre valve closed
3/28/2011	2:51:15 PM	SiCl4 post valve closed
3/28/2011	2:51:15 PM	Main Vac valve closed
3/28/2011	2:51:15 PM	Bypass valve closed
3/28/2011	2:51:15 PM	H2 valve opened
3/28/2011	2:51:15 PM	Bubbler valve opened
3/28/2011	2:51:15 PM	Helium MFC set to  0.000000
3/28/2011	2:51:15 PM	H2 MFC set to  500.000000
3/28/2011	2:51:15 PM	BCl3 MFC set to  0.000000
3/28/2011	2:51:15 PM	PHl3 MFC set to  0.000000
3/28/2011	2:51:15 PM	SiCl4 MFC set to  0.000000
3/28/2011	2:51:15 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	2:51:15 PM	Tube furnace set to 1000
3/28/2011	3:11:15 PM	Helium valve closed
3/28/2011	3:11:15 PM	BCl3 valve closed
3/28/2011	3:11:15 PM	PH3 valve closed
3/28/2011	3:11:15 PM	Main Vac valve closed
3/28/2011	3:11:15 PM	Bypass valve closed
3/28/2011	3:11:15 PM	H2 valve opened
3/28/2011	3:11:15 PM	SiCl4 pre valve opened
3/28/2011	3:11:15 PM	SiCl4 post valve opened
3/28/2011	3:11:15 PM	Bubbler valve opened
3/28/2011	3:11:15 PM	Helium MFC set to  0.000000
3/28/2011	3:11:15 PM	H2 MFC set to  500.000000
3/28/2011	3:11:15 PM	BCl3 MFC set to  0.000000
3/28/2011	3:11:15 PM	PHl3 MFC set to  0.000000
3/28/2011	3:11:15 PM	SiCl4 MFC set to  50.000000
3/28/2011	3:11:15 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	3:11:16 PM	Tube furnace set to 1000
3/28/2011	3:31:16 PM	Helium valve closed
3/28/2011	3:31:16 PM	BCl3 valve closed
3/28/2011	3:31:16 PM	PH3 valve closed
3/28/2011	3:31:16 PM	SiCl4 pre valve closed
3/28/2011	3:31:16 PM	SiCl4 post valve closed
3/28/2011	3:31:16 PM	Main Vac valve closed
3/28/2011	3:31:16 PM	Bypass valve closed
3/28/2011	3:31:16 PM	H2 valve opened
3/28/2011	3:31:16 PM	Bubbler valve opened
3/28/2011	3:31:16 PM	Helium MFC set to  0.000000
3/28/2011	3:31:16 PM	H2 MFC set to  500.000000
3/28/2011	3:31:16 PM	BCl3 MFC set to  0.000000
3/28/2011	3:31:16 PM	PHl3 MFC set to  0.000000
3/28/2011	3:31:16 PM	SiCl4 MFC set to  0.000000
3/28/2011	3:31:16 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	3:31:16 PM	Tube furnace set to 0
3/28/2011	3:36:16 PM	H2 valve closed
3/28/2011	3:36:16 PM	BCl3 valve closed
3/28/2011	3:36:16 PM	PH3 valve closed
3/28/2011	3:36:16 PM	SiCl4 pre valve closed
3/28/2011	3:36:16 PM	SiCl4 post valve closed
3/28/2011	3:36:16 PM	Main Vac valve closed
3/28/2011	3:36:16 PM	Bypass valve closed
3/28/2011	3:36:16 PM	Helium valve opened
3/28/2011	3:36:16 PM	Bubbler valve opened
3/28/2011	3:36:16 PM	Helium MFC set to  500.000000
3/28/2011	3:36:16 PM	H2 MFC set to  0.000000
3/28/2011	3:36:16 PM	BCl3 MFC set to  0.000000
3/28/2011	3:36:16 PM	PHl3 MFC set to  0.000000
3/28/2011	3:36:16 PM	SiCl4 MFC set to  0.000000
3/28/2011	3:36:16 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	3:36:16 PM	Tube furnace set to 0
3/28/2011	4:06:52 PM	Helium valve closed
3/28/2011	4:06:52 PM	H2 valve closed
3/28/2011	4:06:52 PM	BCl3 valve closed
3/28/2011	4:06:52 PM	PH3 valve closed
3/28/2011	4:06:52 PM	SiCl4 pre valve closed
3/28/2011	4:06:52 PM	SiCl4 post valve closed
3/28/2011	4:06:52 PM	Main Vac valve closed
3/28/2011	4:06:52 PM	Bypass valve closed
3/28/2011	4:06:52 PM	Bubbler valve closed
3/28/2011	4:06:52 PM	Helium MFC set to  0.000000
3/28/2011	4:06:52 PM	H2 MFC set to  0.000000
3/28/2011	4:06:52 PM	BCl3 MFC set to  0.000000
3/28/2011	4:06:52 PM	PHl3 MFC set to  0.000000
3/28/2011	4:06:52 PM	SiCl4 MFC set to  0.000000
3/28/2011	4:06:52 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	4:06:52 PM	Tube furnace set to 0
3/28/2011	4:06:52 PM	Run finished at 4:06 PM
3/28/2011	4:19:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/28/2011	4:19:06 PM	Recipe started at 4:19 PM
3/28/2011	4:19:06 PM	Helium valve closed
3/28/2011	4:19:06 PM	H2 valve closed
3/28/2011	4:19:06 PM	BCl3 valve closed
3/28/2011	4:19:06 PM	PH3 valve closed
3/28/2011	4:19:06 PM	SiCl4 pre valve closed
3/28/2011	4:19:06 PM	SiCl4 post valve closed
3/28/2011	4:19:06 PM	Main Vac valve closed
3/28/2011	4:19:06 PM	Bubbler valve closed
3/28/2011	4:19:06 PM	Bypass valve opened
3/28/2011	4:19:06 PM	Helium MFC set to  0.000000
3/28/2011	4:19:06 PM	H2 MFC set to  0.000000
3/28/2011	4:19:06 PM	BCl3 MFC set to  0.000000
3/28/2011	4:19:06 PM	PHl3 MFC set to  0.000000
3/28/2011	4:19:06 PM	SiCl4 MFC set to  0.000000
3/28/2011	4:19:06 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	4:19:06 PM	Tube furnace set to 0
3/28/2011	4:19:39 PM	Helium valve closed
3/28/2011	4:19:39 PM	H2 valve closed
3/28/2011	4:19:39 PM	BCl3 valve closed
3/28/2011	4:19:39 PM	PH3 valve closed
3/28/2011	4:19:39 PM	SiCl4 pre valve closed
3/28/2011	4:19:39 PM	SiCl4 post valve closed
3/28/2011	4:19:39 PM	Bubbler valve closed
3/28/2011	4:19:39 PM	Main Vac valve opened
3/28/2011	4:19:39 PM	Bypass valve opened
3/28/2011	4:19:39 PM	Helium MFC set to  0.000000
3/28/2011	4:19:39 PM	H2 MFC set to  0.000000
3/28/2011	4:19:39 PM	BCl3 MFC set to  0.000000
3/28/2011	4:19:39 PM	PHl3 MFC set to  0.000000
3/28/2011	4:19:39 PM	SiCl4 MFC set to  0.000000
3/28/2011	4:19:39 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	4:19:39 PM	Tube furnace set to 0
3/28/2011	4:19:40 PM	Run finished at 4:19 PM
3/28/2011	4:19:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/28/2011	4:20:41 PM	Helium MFC set to  40.000000
3/28/2011	4:20:42 PM	Helium valve opened
3/28/2011	4:20:52 PM	Helium valve closed
3/28/2011	4:21:07 PM	Helium valve opened
3/28/2011	4:44:58 PM	Helium valve closed
3/28/2011	4:45:30 PM	Helium valve opened
3/28/2011	5:14:33 PM	Helium valve closed
3/28/2011	5:15:29 PM	Helium valve opened
3/28/2011	5:22:38 PM	Helium valve closed
3/28/2011	5:23:43 PM	Recipe started at 5:23 PM
3/28/2011	5:23:43 PM	Helium valve closed
3/28/2011	5:23:43 PM	BCl3 valve closed
3/28/2011	5:23:43 PM	PH3 valve closed
3/28/2011	5:23:43 PM	SiCl4 pre valve closed
3/28/2011	5:23:43 PM	SiCl4 post valve closed
3/28/2011	5:23:43 PM	Main Vac valve closed
3/28/2011	5:23:43 PM	Bypass valve closed
3/28/2011	5:23:43 PM	Bubbler valve closed
3/28/2011	5:23:43 PM	H2 valve opened
3/28/2011	5:23:43 PM	Helium MFC set to  0.000000
3/28/2011	5:23:43 PM	H2 MFC set to  500.000000
3/28/2011	5:23:43 PM	BCl3 MFC set to  0.000000
3/28/2011	5:23:43 PM	PHl3 MFC set to  0.000000
3/28/2011	5:23:43 PM	SiCl4 MFC set to  0.000000
3/28/2011	5:23:43 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	5:23:43 PM	Tube furnace set to 0
3/28/2011	5:25:05 PM	Helium valve closed
3/28/2011	5:25:05 PM	BCl3 valve closed
3/28/2011	5:25:05 PM	PH3 valve closed
3/28/2011	5:25:05 PM	SiCl4 pre valve closed
3/28/2011	5:25:05 PM	SiCl4 post valve closed
3/28/2011	5:25:05 PM	Main Vac valve closed
3/28/2011	5:25:05 PM	Bypass valve closed
3/28/2011	5:25:05 PM	H2 valve opened
3/28/2011	5:25:05 PM	Bubbler valve opened
3/28/2011	5:25:05 PM	Helium MFC set to  0.000000
3/28/2011	5:25:05 PM	H2 MFC set to  500.000000
3/28/2011	5:25:05 PM	BCl3 MFC set to  0.000000
3/28/2011	5:25:05 PM	PHl3 MFC set to  0.000000
3/28/2011	5:25:05 PM	SiCl4 MFC set to  0.000000
3/28/2011	5:25:05 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	5:25:05 PM	Tube furnace set to 1000
3/28/2011	5:45:05 PM	Helium valve closed
3/28/2011	5:45:05 PM	BCl3 valve closed
3/28/2011	5:45:05 PM	PH3 valve closed
3/28/2011	5:45:05 PM	Main Vac valve closed
3/28/2011	5:45:05 PM	Bypass valve closed
3/28/2011	5:45:05 PM	H2 valve opened
3/28/2011	5:45:05 PM	SiCl4 pre valve opened
3/28/2011	5:45:05 PM	SiCl4 post valve opened
3/28/2011	5:45:05 PM	Bubbler valve opened
3/28/2011	5:45:05 PM	Helium MFC set to  0.000000
3/28/2011	5:45:05 PM	H2 MFC set to  500.000000
3/28/2011	5:45:05 PM	BCl3 MFC set to  0.000000
3/28/2011	5:45:05 PM	PHl3 MFC set to  0.000000
3/28/2011	5:45:05 PM	SiCl4 MFC set to  50.000000
3/28/2011	5:45:05 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	5:45:05 PM	Tube furnace set to 1000
3/28/2011	6:15:05 PM	Helium valve closed
3/28/2011	6:15:05 PM	BCl3 valve closed
3/28/2011	6:15:05 PM	PH3 valve closed
3/28/2011	6:15:05 PM	SiCl4 pre valve closed
3/28/2011	6:15:05 PM	SiCl4 post valve closed
3/28/2011	6:15:05 PM	Main Vac valve closed
3/28/2011	6:15:05 PM	Bypass valve closed
3/28/2011	6:15:05 PM	H2 valve opened
3/28/2011	6:15:05 PM	Bubbler valve opened
3/28/2011	6:15:05 PM	Helium MFC set to  0.000000
3/28/2011	6:15:05 PM	H2 MFC set to  500.000000
3/28/2011	6:15:05 PM	BCl3 MFC set to  0.000000
3/28/2011	6:15:05 PM	PHl3 MFC set to  0.000000
3/28/2011	6:15:05 PM	SiCl4 MFC set to  0.000000
3/28/2011	6:15:05 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	6:15:06 PM	Tube furnace set to 0
3/28/2011	6:20:06 PM	H2 valve closed
3/28/2011	6:20:06 PM	BCl3 valve closed
3/28/2011	6:20:06 PM	PH3 valve closed
3/28/2011	6:20:06 PM	SiCl4 pre valve closed
3/28/2011	6:20:06 PM	SiCl4 post valve closed
3/28/2011	6:20:06 PM	Main Vac valve closed
3/28/2011	6:20:06 PM	Bypass valve closed
3/28/2011	6:20:06 PM	Helium valve opened
3/28/2011	6:20:06 PM	Bubbler valve opened
3/28/2011	6:20:06 PM	Helium MFC set to  500.000000
3/28/2011	6:20:06 PM	H2 MFC set to  0.000000
3/28/2011	6:20:06 PM	BCl3 MFC set to  0.000000
3/28/2011	6:20:06 PM	PHl3 MFC set to  0.000000
3/28/2011	6:20:06 PM	SiCl4 MFC set to  0.000000
3/28/2011	6:20:06 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	6:20:06 PM	Tube furnace set to 0
3/28/2011	6:53:26 PM	Helium valve closed
3/28/2011	6:53:26 PM	H2 valve closed
3/28/2011	6:53:26 PM	BCl3 valve closed
3/28/2011	6:53:26 PM	PH3 valve closed
3/28/2011	6:53:26 PM	SiCl4 pre valve closed
3/28/2011	6:53:26 PM	SiCl4 post valve closed
3/28/2011	6:53:26 PM	Main Vac valve closed
3/28/2011	6:53:26 PM	Bypass valve closed
3/28/2011	6:53:26 PM	Bubbler valve closed
3/28/2011	6:53:26 PM	Helium MFC set to  0.000000
3/28/2011	6:53:26 PM	H2 MFC set to  0.000000
3/28/2011	6:53:26 PM	BCl3 MFC set to  0.000000
3/28/2011	6:53:26 PM	PHl3 MFC set to  0.000000
3/28/2011	6:53:26 PM	SiCl4 MFC set to  0.000000
3/28/2011	6:53:26 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	6:53:26 PM	Tube furnace set to 0
3/28/2011	6:53:26 PM	Run finished at 6:53 PM
3/28/2011	7:18:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/28/2011	7:18:54 PM	Recipe started at 7:18 PM
3/28/2011	7:18:54 PM	Helium valve closed
3/28/2011	7:18:54 PM	H2 valve closed
3/28/2011	7:18:54 PM	BCl3 valve closed
3/28/2011	7:18:54 PM	PH3 valve closed
3/28/2011	7:18:54 PM	SiCl4 pre valve closed
3/28/2011	7:18:54 PM	SiCl4 post valve closed
3/28/2011	7:18:54 PM	Main Vac valve closed
3/28/2011	7:18:54 PM	Bubbler valve closed
3/28/2011	7:18:54 PM	Bypass valve opened
3/28/2011	7:18:54 PM	Helium MFC set to  0.000000
3/28/2011	7:18:54 PM	H2 MFC set to  0.000000
3/28/2011	7:18:54 PM	BCl3 MFC set to  0.000000
3/28/2011	7:18:54 PM	PHl3 MFC set to  0.000000
3/28/2011	7:18:54 PM	SiCl4 MFC set to  0.000000
3/28/2011	7:18:54 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	7:18:54 PM	Tube furnace set to 0
3/28/2011	7:19:27 PM	Helium valve closed
3/28/2011	7:19:27 PM	H2 valve closed
3/28/2011	7:19:27 PM	BCl3 valve closed
3/28/2011	7:19:27 PM	PH3 valve closed
3/28/2011	7:19:27 PM	SiCl4 pre valve closed
3/28/2011	7:19:27 PM	SiCl4 post valve closed
3/28/2011	7:19:27 PM	Bubbler valve closed
3/28/2011	7:19:27 PM	Main Vac valve opened
3/28/2011	7:19:27 PM	Bypass valve opened
3/28/2011	7:19:27 PM	Helium MFC set to  0.000000
3/28/2011	7:19:27 PM	H2 MFC set to  0.000000
3/28/2011	7:19:27 PM	BCl3 MFC set to  0.000000
3/28/2011	7:19:27 PM	PHl3 MFC set to  0.000000
3/28/2011	7:19:27 PM	SiCl4 MFC set to  0.000000
3/28/2011	7:19:27 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	7:19:27 PM	Tube furnace set to 0
3/28/2011	7:19:28 PM	Run finished at 7:19 PM
3/28/2011	7:19:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/28/2011	7:19:38 PM	Helium MFC set to  20.000000
3/28/2011	7:19:39 PM	Helium valve opened
3/28/2011	7:55:10 PM	Helium valve closed
3/28/2011	7:55:55 PM	Helium MFC set to  40.000000
3/28/2011	7:55:55 PM	Helium valve opened
3/28/2011	7:56:29 PM	Helium valve closed
3/28/2011	7:57:22 PM	Helium valve opened
3/28/2011	8:08:30 PM	Helium valve closed
3/28/2011	8:09:25 PM	Helium valve opened
3/28/2011	8:39:24 PM	Helium valve closed
3/28/2011	8:40:12 PM	Helium valve opened
3/28/2011	8:41:15 PM	Helium valve closed
3/28/2011	8:42:09 PM	Recipe started at 8:42 PM
3/28/2011	8:42:09 PM	Helium valve closed
3/28/2011	8:42:09 PM	BCl3 valve closed
3/28/2011	8:42:09 PM	PH3 valve closed
3/28/2011	8:42:09 PM	SiCl4 pre valve closed
3/28/2011	8:42:09 PM	SiCl4 post valve closed
3/28/2011	8:42:09 PM	Main Vac valve closed
3/28/2011	8:42:09 PM	Bypass valve closed
3/28/2011	8:42:09 PM	Bubbler valve closed
3/28/2011	8:42:09 PM	H2 valve opened
3/28/2011	8:42:09 PM	Helium MFC set to  0.000000
3/28/2011	8:42:09 PM	H2 MFC set to  500.000000
3/28/2011	8:42:09 PM	BCl3 MFC set to  0.000000
3/28/2011	8:42:09 PM	PHl3 MFC set to  0.000000
3/28/2011	8:42:09 PM	SiCl4 MFC set to  0.000000
3/28/2011	8:42:09 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	8:42:09 PM	Tube furnace set to 0
3/28/2011	8:43:31 PM	Helium valve closed
3/28/2011	8:43:31 PM	BCl3 valve closed
3/28/2011	8:43:31 PM	PH3 valve closed
3/28/2011	8:43:31 PM	SiCl4 pre valve closed
3/28/2011	8:43:31 PM	SiCl4 post valve closed
3/28/2011	8:43:31 PM	Main Vac valve closed
3/28/2011	8:43:31 PM	Bypass valve closed
3/28/2011	8:43:31 PM	H2 valve opened
3/28/2011	8:43:31 PM	Bubbler valve opened
3/28/2011	8:43:31 PM	Helium MFC set to  0.000000
3/28/2011	8:43:31 PM	H2 MFC set to  500.000000
3/28/2011	8:43:31 PM	BCl3 MFC set to  0.000000
3/28/2011	8:43:31 PM	PHl3 MFC set to  0.000000
3/28/2011	8:43:31 PM	SiCl4 MFC set to  0.000000
3/28/2011	8:43:31 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	8:43:31 PM	Tube furnace set to 1000
3/28/2011	9:03:31 PM	Helium valve closed
3/28/2011	9:03:31 PM	BCl3 valve closed
3/28/2011	9:03:31 PM	PH3 valve closed
3/28/2011	9:03:31 PM	Main Vac valve closed
3/28/2011	9:03:31 PM	Bypass valve closed
3/28/2011	9:03:31 PM	H2 valve opened
3/28/2011	9:03:31 PM	SiCl4 pre valve opened
3/28/2011	9:03:31 PM	SiCl4 post valve opened
3/28/2011	9:03:31 PM	Bubbler valve opened
3/28/2011	9:03:31 PM	Helium MFC set to  0.000000
3/28/2011	9:03:31 PM	H2 MFC set to  500.000000
3/28/2011	9:03:31 PM	BCl3 MFC set to  0.000000
3/28/2011	9:03:31 PM	PHl3 MFC set to  0.000000
3/28/2011	9:03:31 PM	SiCl4 MFC set to  50.000000
3/28/2011	9:03:31 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	9:03:31 PM	Tube furnace set to 1000
3/28/2011	9:33:31 PM	Helium valve closed
3/28/2011	9:33:31 PM	BCl3 valve closed
3/28/2011	9:33:31 PM	PH3 valve closed
3/28/2011	9:33:31 PM	SiCl4 pre valve closed
3/28/2011	9:33:31 PM	SiCl4 post valve closed
3/28/2011	9:33:31 PM	Main Vac valve closed
3/28/2011	9:33:31 PM	Bypass valve closed
3/28/2011	9:33:31 PM	H2 valve opened
3/28/2011	9:33:31 PM	Bubbler valve opened
3/28/2011	9:33:31 PM	Helium MFC set to  0.000000
3/28/2011	9:33:31 PM	H2 MFC set to  500.000000
3/28/2011	9:33:31 PM	BCl3 MFC set to  0.000000
3/28/2011	9:33:31 PM	PHl3 MFC set to  0.000000
3/28/2011	9:33:31 PM	SiCl4 MFC set to  0.000000
3/28/2011	9:33:31 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	9:33:31 PM	Tube furnace set to 0
3/28/2011	9:38:31 PM	H2 valve closed
3/28/2011	9:38:31 PM	BCl3 valve closed
3/28/2011	9:38:31 PM	PH3 valve closed
3/28/2011	9:38:31 PM	SiCl4 pre valve closed
3/28/2011	9:38:31 PM	SiCl4 post valve closed
3/28/2011	9:38:31 PM	Main Vac valve closed
3/28/2011	9:38:31 PM	Bypass valve closed
3/28/2011	9:38:31 PM	Helium valve opened
3/28/2011	9:38:31 PM	Bubbler valve opened
3/28/2011	9:38:31 PM	Helium MFC set to  500.000000
3/28/2011	9:38:31 PM	H2 MFC set to  0.000000
3/28/2011	9:38:31 PM	BCl3 MFC set to  0.000000
3/28/2011	9:38:31 PM	PHl3 MFC set to  0.000000
3/28/2011	9:38:31 PM	SiCl4 MFC set to  0.000000
3/28/2011	9:38:31 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	9:38:31 PM	Tube furnace set to 0
3/28/2011	10:11:51 PM	Helium valve closed
3/28/2011	10:11:51 PM	H2 valve closed
3/28/2011	10:11:51 PM	BCl3 valve closed
3/28/2011	10:11:51 PM	PH3 valve closed
3/28/2011	10:11:51 PM	SiCl4 pre valve closed
3/28/2011	10:11:51 PM	SiCl4 post valve closed
3/28/2011	10:11:51 PM	Main Vac valve closed
3/28/2011	10:11:51 PM	Bypass valve closed
3/28/2011	10:11:51 PM	Bubbler valve closed
3/28/2011	10:11:51 PM	Helium MFC set to  0.000000
3/28/2011	10:11:51 PM	H2 MFC set to  0.000000
3/28/2011	10:11:51 PM	BCl3 MFC set to  0.000000
3/28/2011	10:11:51 PM	PHl3 MFC set to  0.000000
3/28/2011	10:11:51 PM	SiCl4 MFC set to  0.000000
3/28/2011	10:11:51 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	10:11:51 PM	Tube furnace set to 0
3/28/2011	10:11:51 PM	Run finished at 10:11 PM
3/28/2011	10:38:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/28/2011	10:38:14 PM	Recipe started at 10:38 PM
3/28/2011	10:38:14 PM	Helium valve closed
3/28/2011	10:38:14 PM	H2 valve closed
3/28/2011	10:38:14 PM	BCl3 valve closed
3/28/2011	10:38:14 PM	PH3 valve closed
3/28/2011	10:38:14 PM	SiCl4 pre valve closed
3/28/2011	10:38:14 PM	SiCl4 post valve closed
3/28/2011	10:38:14 PM	Main Vac valve closed
3/28/2011	10:38:14 PM	Bubbler valve closed
3/28/2011	10:38:14 PM	Bypass valve opened
3/28/2011	10:38:14 PM	Helium MFC set to  0.000000
3/28/2011	10:38:14 PM	H2 MFC set to  0.000000
3/28/2011	10:38:14 PM	BCl3 MFC set to  0.000000
3/28/2011	10:38:14 PM	PHl3 MFC set to  0.000000
3/28/2011	10:38:14 PM	SiCl4 MFC set to  0.000000
3/28/2011	10:38:14 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	10:38:14 PM	Tube furnace set to 0
3/28/2011	10:38:47 PM	Helium valve closed
3/28/2011	10:38:47 PM	H2 valve closed
3/28/2011	10:38:47 PM	BCl3 valve closed
3/28/2011	10:38:47 PM	PH3 valve closed
3/28/2011	10:38:47 PM	SiCl4 pre valve closed
3/28/2011	10:38:47 PM	SiCl4 post valve closed
3/28/2011	10:38:47 PM	Bubbler valve closed
3/28/2011	10:38:47 PM	Main Vac valve opened
3/28/2011	10:38:47 PM	Bypass valve opened
3/28/2011	10:38:47 PM	Helium MFC set to  0.000000
3/28/2011	10:38:47 PM	H2 MFC set to  0.000000
3/28/2011	10:38:47 PM	BCl3 MFC set to  0.000000
3/28/2011	10:38:47 PM	PHl3 MFC set to  0.000000
3/28/2011	10:38:47 PM	SiCl4 MFC set to  0.000000
3/28/2011	10:38:47 PM	Bypass solenoid MFC set to  0.000000
3/28/2011	10:38:47 PM	Tube furnace set to 0
3/28/2011	10:38:48 PM	Run finished at 10:38 PM
3/28/2011	10:38:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
